Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699596 | Metal etching with in situ plasma ashing | Hsing-Hsiang WANG, Yu-Hsiang Lin, Wei Chen, P. Y. Chiu, Miau-Shing Tsai +2 more | 2023-07-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699596 | Metal etching with in situ plasma ashing | Hsing-Hsiang WANG, Yu-Hsiang Lin, Wei Chen, P. Y. Chiu, Miau-Shing Tsai +2 more | 2023-07-11 |