Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11693295 | Auto-focusing device and method of fabricating the same | Shih-Wei Lin | 2023-07-04 |
| 11661337 | Comb electrode release process for MEMS structure | Lee-Chuan Tseng | 2023-05-30 |
| 11634320 | Micro-electromechanical system device including a precision proof mass element and methods for forming the same | Shih-Wei Lin | 2023-04-25 |
| 11557710 | Fully-wet via patterning method in piezoelectric sensor | Ming Chyi Liu | 2023-01-17 |