Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769662 | Method for reducing charging of semiconductor wafers | Wei-Lin Chang, Chih-Chien Wang, Chihy-Yuan Cheng, Chien-Hung Lin, Chun-Chang Chen +2 more | 2023-09-26 |
| 11665897 | Improving surface topography by forming spacer-like components | Chun-Chang Wu, Chihy-Yuan Cheng, Shun-Shing Yang, Wei-Lin Chang, Ching-Sen Kuo +2 more | 2023-05-30 |