Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11766703 | Apparatus and method for wafer cleaning | Bo Chen Chen, Yung-Li Tsai | 2023-09-26 |
| 11581199 | Wafer drying system | Wei-Chun Hsu, Shu Wang | 2023-02-14 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11766703 | Apparatus and method for wafer cleaning | Bo Chen Chen, Yung-Li Tsai | 2023-09-26 |
| 11581199 | Wafer drying system | Wei-Chun Hsu, Shu Wang | 2023-02-14 |