Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581169 | Ion collector for use in plasma systems | Chi-Ying Wu, Chia-Chih Chen | 2023-02-14 |
| 11569099 | Wafer cooling system | Chia-Chih Chen | 2023-01-31 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581169 | Ion collector for use in plasma systems | Chi-Ying Wu, Chia-Chih Chen | 2023-02-14 |
| 11569099 | Wafer cooling system | Chia-Chih Chen | 2023-01-31 |