Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854793 | Semiconductor wafer cleaning apparatus | Chia-Lun Chen, Po-Jen Shih, Wen-Hung Hsu | 2023-12-26 |
| 11817336 | Wafer process monitoring system and method | Chia-Lun Chen, Cheng-Hao Kuo | 2023-11-14 |
| 11626300 | Wafer holding pins and methods of using the same | Chia-Lun Chen, Po-Jen Shih, Wen-Hung Hsu | 2023-04-11 |