Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11685055 | Robot gripper for moving wafer carriers and packing materials and method of operating the same | Chien-Fa Lee, FU-CHENG HUNG, Chi-Wei Chen, Chih-Hua Chen | 2023-06-27 |
| 11664206 | Arcing protection method and processing tool | Wun-Kai TSAI, Wen-Che LIANG, Chao-Keng Li, Zheng Xu, Chih-Kuo Chang +2 more | 2023-05-30 |
| D984906 | Temperature measuring instrument | — | 2023-05-02 |