Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11826709 | Filter apparatus for semiconductor device fabrication process | Chwen Yu, Chih-Chiang Tseng, Tzu-Sou Chuang | 2023-11-28 |
| 11668639 | Method for processing a substrate by using fluid flowing through a particle detector | Chwen Yu, Mei Lee, Shu-Yu Hsu | 2023-06-06 |