Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11731232 | Irregular mechanical motion detection systems and method | Yu-Chi Tsai, Chin Wei Chuang, Bo-An Chen, Sheng-Chen Wang, Chen-Hua Tsai | 2023-08-22 |
| 11691243 | Method of using polishing pad | Jung-Yu Li, Sheng-Chen Wang, Shih-Sian HUANG | 2023-07-04 |
| 11679472 | Method for CMP pad conditioning | Sheng-Chen Wang | 2023-06-20 |
| 11554578 | Pad removal method | Sheng-Chen Wang | 2023-01-17 |