Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11781995 | Method and apparatus for monitoring edge bevel removal area in semiconductor apparatus and electroplating system | Chao-Tung Wu, Kuo-Chung Yu, Sheng-Ping Weng | 2023-10-10 |
| 11687102 | Systems and methods for automatic concentration control | Chia-Lun Chen, Cheng-Hao Kuo | 2023-06-27 |
| 11586230 | Systems and methods for automatic concentration control | Cheng-Hao Kuo, Chia-Lun Chen | 2023-02-21 |