Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854861 | System and method for performing spin dry etching | Chih-Chiang Tu | 2023-12-26 |
| 11735421 | Reflection mode photomask and method of making | Chih-Chiang Tu | 2023-08-22 |
| 11662656 | Mask and method of forming the same | Chih-Chiang Tu, Shih-Hao Yang, Jheng-Yuan Chen | 2023-05-30 |