Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11823878 | Deposition apparatus, deposition target structure, and method | Yen-Yu Chen | 2023-11-21 |
| 11725270 | PVD target design and semiconductor devices formed using the same | Yen-Yu Chen, Yi-Chih Chen, Shih Wei Bih | 2023-08-15 |
| 11688591 | Physical vapor deposition apparatus and method thereof | Kun-Che Ho, Yen-Yu Chen | 2023-06-27 |