Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776910 | Partial barrier free vias for cobalt-based interconnects and methods of fabrication thereof | Tsung-Ling Tsai, Shen-Nan Lee, Mrunal A. Khaderbad, Chung-Wei Hsu, Teng-Chun Tsai | 2023-10-03 |
| 11752592 | Slurry enhancement for polishing system | Chun-Hung Liao, An-Hsuan Lee, Huang-Lin Chao | 2023-09-12 |
| 11756825 | Semiconductor structure with oxidized ruthenium | Shen-Nan Lee, Teng-Chun Tsai, Chu-An Lee, Chun-Hung Liao, Tsung-Ling Tsai | 2023-09-12 |
| 11697183 | Fabrication of a polishing pad for chemical mechanical polishing | An-Hsuan Lee, Ming-Shiuan She, Chun-Hung Liao, Shen-Nan Lee, Teng-Chun Tsai | 2023-07-11 |
| 11688607 | Slurry | Chun-Hung Liao, Chung-Wei Hsu, Tsung-Ling Tsai, An-Hsuan Lee, Shen-Nan Lee +2 more | 2023-06-27 |
| 11688644 | Fin isolation structure for FinFET and method of forming the same | Chu-An Lee, Peng-Chung Jangjian, Chun-Wen Hsiao, Teng-Chun Tsai, Huang-Lin Chao | 2023-06-27 |