Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769659 | Showerhead assembly and method of servicing assembly for semiconductor manufacturing | Po-Wei Wang, Hsiao-Feng Lu | 2023-09-26 |
| 11578402 | Film forming apparatus and method for reducing arcing | Po-Wei Wang | 2023-02-14 |