Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541506 | Chemical mechanical polishing (CMP) polishing head with improved vacuum sealing | Jayakumar Pachaiyappan | 2023-01-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11541506 | Chemical mechanical polishing (CMP) polishing head with improved vacuum sealing | Jayakumar Pachaiyappan | 2023-01-03 |