Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11702760 | N-type silicon single crystal production method, n-type silicon single crystal ingot, silicon wafer, and epitaxial silicon wafer | Koichi Maegawa, Yasuhito Narushima, Yasufumi KAWAKAMI, Ayumi Kihara | 2023-07-18 |
| 11639560 | Deposit removing device and deposit removing method | Takuya Yotsui, Koichi Maegawa | 2023-05-02 |