Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854767 | Measuring method and plasma processing apparatus | — | 2023-12-26 |
| 11658012 | Control method and plasma processing apparatus | Toshiyuki ARAKANE, Tetsu TSUNAMOTO, Yoshinori Osaki | 2023-05-23 |