Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11769697 | Wafer evaluation method | Ja Young Kim | 2023-09-26 |
| 11597607 | Automated material handling system having carrier pollution management function | Hak Seo OH, Sang Kyo Ahn, Jin Hwan Ko, Sang Gyu Han, Sung Ik KIM +5 more | 2023-03-07 |