Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11725076 | Polymer for formation of resist underlayer film, composition for formation of resist underlayer film comprising same and method for manufacturing semiconductor element by using same | Minho Jung, Namkyu Lee, Jinsu Ham, Kyunphyo Lee, Kwangkuk Lee +2 more | 2023-08-15 |