Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597998 | Vacuum lock and method for transferring a substrate carrier | Michael Reising, Dieter Scherger | 2023-03-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11597998 | Vacuum lock and method for transferring a substrate carrier | Michael Reising, Dieter Scherger | 2023-03-07 |