Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834754 | ALD method with multi-chambers for sic or multi-elements epitaxial growth | Zhuangzhuang Wu, Min-hwa Chi | 2023-12-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11834754 | ALD method with multi-chambers for sic or multi-elements epitaxial growth | Zhuangzhuang Wu, Min-hwa Chi | 2023-12-05 |