Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11817793 | Power converter and capacitor module | Kazunari Kojima | 2023-11-14 |
| 11693323 | Control apparatus, positioning apparatus, lithography apparatus, and article manufacturing method | — | 2023-07-04 |
| 11630398 | Control apparatus, exposure apparatus, and method of manufacturing article | — | 2023-04-18 |