Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846884 | Chemically amplified resist composition and patterning process | Jun Hatakeyama, Takeshi Nagata | 2023-12-19 |
| 11835859 | Resist composition and patterning process | Jun Hatakeyama, Takeshi Nagata | 2023-12-05 |