Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11784040 | Substrate treatment device | Kensuke Demura, Masaya KAMIYA | 2023-10-10 |
| 11609491 | Reflective mask cleaning apparatus and reflective mask cleaning method | Kensuke Demura, Masafumi Suzuki, Satoshi Nakamura | 2023-03-21 |