Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11668625 | Apparatus and method for detecting wavefront aberration of objective lens | Peng Li, Feng Tang, Xiangzhao Wang, Yang Liu, Xiangyu Wei +2 more | 2023-06-06 |
| 11604418 | Multi-channel device and method for measuring distortion and magnification of objective lens | Yisha Cao, Feng Tang, Xiangzhao Wang, Yang Liu | 2023-03-14 |
| 11561082 | Method for compensation during the process of wavefront reconstruction in grating-based lateral shearing interferometry | Peng Li, Feng Tang, Xiangzhao Wang, Yang Liu | 2023-01-24 |