Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11845090 | Nozzle apparatus, apparatus and method for treating substrate | Chang Suk OH, UnKyu KANG | 2023-12-19 |
| 11752530 | Fluid discharging device, substrate processing system including same, and fluid discharging method thereof | Sang Eun NOH, Dae Sung Kim | 2023-09-12 |