Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809158 | Apparatus and method for treating substrate based on defect values of transfer paths | Taerim Lee, Youngje Um | 2023-11-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11809158 | Apparatus and method for treating substrate based on defect values of transfer paths | Taerim Lee, Youngje Um | 2023-11-07 |