Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772115 | Substrate treating apparatus and treatment liquid dispensing method for controlling a temperature of treatment liquid | Kang Suk Lee, Joo-Sung Lee | 2023-10-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11772115 | Substrate treating apparatus and treatment liquid dispensing method for controlling a temperature of treatment liquid | Kang Suk Lee, Joo-Sung Lee | 2023-10-03 |