Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631606 | Substrate storage apparatus and apparatus for processing substrate using the same | Duk Hyun Son | 2023-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11631606 | Substrate storage apparatus and apparatus for processing substrate using the same | Duk Hyun Son | 2023-04-18 |