Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11756817 | Apparatus and method for processing substrate | Sunghwan Hong | 2023-09-12 |
| 11699599 | Substrate transfer apparatus and substrate treating apparatus | Byung Kyu Kim | 2023-07-11 |
| 11569110 | Buffer unit, and apparatus and method for treating substrate with the unit | — | 2023-01-31 |