Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11794219 | Liquid supply unit and substrate treating apparatus and method | Seungtae YANG, Seung-Hwan Cho | 2023-10-24 |
| 11658048 | Unit for supplying liquid, apparatus and method for treating substrate having the unit | Seong-soo Lee, Gi Hun CHOI, Myung A JEON, Soo Young Park | 2023-05-23 |