Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839893 | Substrate processing apparatus | Yosuke YASUTAKE, Hiroaki Ishii, Yutaka IKEGAMI | 2023-12-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11839893 | Substrate processing apparatus | Yosuke YASUTAKE, Hiroaki Ishii, Yutaka IKEGAMI | 2023-12-12 |