Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11598005 | Deposition apparatus including an off-axis lift-and-rotation unit and methods for operating the same | Shoichi Murakami, Shigeru NAKATSUKA, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2023-03-07 |
| 11551961 | Multi-zone plasma-enhanced chemical vapor deposition apparatus and methods for operating the same | Shoichi Murakami, Shigeru NAKATSUKA, Yusuke OSAWA, Shigehiro Fujino, Masaaki Higashitani | 2023-01-10 |