Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569065 | Substrate processing apparatus, signal source device, method of processing material layer, and method of fabricating semiconductor device | Min Seop Park, Gon-jun Kim, Jae-Jik Baek, Jae-Jin Shin, In-hye JEONG | 2023-01-31 |