Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11776858 | Plasma apparatus and methods of manufacturing semiconductor device using the same | Joonsung Lee, Youngwon Shin, Hyungchul Cho, Jaehyoung Lee, Hyunjae Jung | 2023-10-03 |