Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721568 | Substrate transfer apparatus | Dongsoo Lee, Anhi Pyun, Jinyi Lee, Sukbyung Chae | 2023-08-08 |
| 11623853 | Fluid supply apparatus and substrate processing apparatus including the same | Kibeom KIL, Dongsoo Lee, Wooram Oh | 2023-04-11 |