Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821106 | Semiconductor process chamber including lower volume upper dome | Keum Seok Park, Gyeom Kim, Yi Hwan Kim, Sun-Jung Kim, Jeong Ho Yoo | 2023-11-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821106 | Semiconductor process chamber including lower volume upper dome | Keum Seok Park, Gyeom Kim, Yi Hwan Kim, Sun-Jung Kim, Jeong Ho Yoo | 2023-11-21 |