Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11729896 | Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system | Jihoon Na, Jaewhan Sung, Byungchul Yoo, Jibeom Yoo, Hakseok Lee +2 more | 2023-08-15 |