Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662659 | Photomask, exposure apparatus, and method of fabricating three-dimensional semiconductor memory device using the same | Donghwan Kim, Woosung Kim, Gunwoo Park, Jang Hwan JEONG | 2023-05-30 |