Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11662665 | Lithography method using multiscale simulation, and method of manufacturing semiconductor device and exposure equipment based on the lithography method | Byunghoon Lee, Maenghyo Cho, Changyoung Jeong, Muyoung Kim, Sungwoo Park +1 more | 2023-05-30 |