Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676824 | Chemical mechanical polishing apparatus for controlling polishing uniformity | Seung Ho Park, Sang Won Bae, Woo In LEE, Hyo-San Lee, Sun-jae Jang | 2023-06-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676824 | Chemical mechanical polishing apparatus for controlling polishing uniformity | Seung Ho Park, Sang Won Bae, Woo In LEE, Hyo-San Lee, Sun-jae Jang | 2023-06-13 |