Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11746258 | CMP slurry composition for copper films and method of polishing copper films using the same | Keun-Sam Jang, Dong-Hun Kang, Jong Won Lee | 2023-09-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11746258 | CMP slurry composition for copper films and method of polishing copper films using the same | Keun-Sam Jang, Dong-Hun Kang, Jong Won Lee | 2023-09-05 |