Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11813716 | Substrate processing apparatus having chamber cover | Jwahyeon Kim, Sungjoon Joo, Kyungho Ha | 2023-11-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11813716 | Substrate processing apparatus having chamber cover | Jwahyeon Kim, Sungjoon Joo, Kyungho Ha | 2023-11-14 |