Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846509 | Three-axis rotation rate sensor including a substrate and a double rotor | — | 2023-12-19 |
| 11787687 | Method for manufacturing a micromechanical structure and micromechanical structure | Andrea Urban, Luise Fuchs, Thomas Friedrich | 2023-10-17 |
| 11585710 | Capacitive pressure sensor with reduced bimetal effect | — | 2023-02-21 |
| 11585830 | Micromechanical z-inertial sensor | — | 2023-02-21 |