Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569118 | Semiconductor manufacturing apparatus and manufacturing method for semiconductor device | Tsuyoshi Yokomori, Tatsuyuki Okubo, Yuki NAKUI, Akira Saito, Naoki Okamoto | 2023-01-31 |