Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815467 | Nano projection structure inspection apparatus and nano projection structure inspection method | Yuki Sato, Masataka ASAI, Tsuyoshi Asano, Masahiro UCHIMURA, Nozomi TATEYAMA | 2023-11-14 |