Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747494 | Ion filter using aperture plate with plurality of zones | Leslie Michael Lea, Linnell Martinez, Michael Morgan | 2023-09-05 |
| 11651999 | Method and apparatus for plasma dicing a semi-conductor wafer | Tsu-Wu Chiang | 2023-05-16 |
| 11587834 | Protective coating for plasma dicing | — | 2023-02-21 |