Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830726 | Subnanometer-level light-based substrate cleaning mechanism | Harry Christov | 2023-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830726 | Subnanometer-level light-based substrate cleaning mechanism | Harry Christov | 2023-11-28 |