Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11550230 | Substrate deforming device for proximity exposure, and substrate deforming method for proximity exposure using same | Changkyu Lee | 2023-01-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11550230 | Substrate deforming device for proximity exposure, and substrate deforming method for proximity exposure using same | Changkyu Lee | 2023-01-10 |