Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11661669 | Substrate processing system, controller and method using test operation without substrate | Kazuma Ideguchi, Shugo Midorikawa, Tensei Sato, Hideki Wakabayashi | 2023-05-30 |